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● ◆ Minimum detection element: 01005 (Inch system)
● ◆ Precision: XY direction & LT;10 um;Height = 0.37 um
● ◆ Repeatability accuracy: Height & LT;1 um sigma (4);Area/volume <& lt;1% (4 sigma)
● ◆ Size of 510x505mm PCB board;470x470mm test area
● ◆ Ultra-high frame precision industrial camera
● Detection speed: 0.42 seconds /FOV
● ◆ Mark identification: 0.3 seconds/piece
● ◆ Maximum detection height: +/-450um

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